Plasma deposition of amorphous silicon-based materials / Giovanni Bruno, Pio Capezzuto, Arun Madan
Publication: Boston : Academic Press, 1995Description: XI, 324 p. : il. ; 24 cmISBN: 0-12-137940-X.Series: Plasma-Materials InteractionsSubject - Topical Name: Electrónica | Semicondutores | Design | Espectrometria de massa| Item type | Current location | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|
| Livro | Biblioteca do ISEL | BRU. 621.38 (Browse shelf) | Available | 1013940 |
Total holds: 0
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